Study, development, and experimental characterization of acoustic-wave piezoelectric MEMS transducers

MEMS (Micro Electro-Mechanical Systems) devices represent a significant advancement in sensor technology. Their miniaturization, coupled with reliable performance and a wide array of applications, has propelled them to the forefront of modern sensing technology. These devices integrate mechanical and electronic components in a single platform offering extraordinary versatility in fields such as, for example, automotive, consumer electronics, and medicine. A noteworthy advancement that allows to further extend the applications of MEMS is the possibility to integrate nonstandard materials into silicon exploiting different transduction principles such as the piezoelectric effect. This has led to piezoelectric-based MEMS, or piezoMEMS, that can be employed as sensors, energy harvesters or actuators. An emerging and particularly interesting subset of this field is piezoelectric acoustic-wave MEMS. These devices exploit acoustic waves for various applications, such as sensing, actuation, and processing of electrical signals. In this context, my research activities will be oriented towards piezoelectric MEMS transducers and the relative conditioning electronic circuits. The focus will be on the design and analysis of piezoelectric MEMS transducers, including acoustic wave-based configurations, optimizing their functionality.